Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6454869 | Process of cleaning semiconductor processing, handling and manufacturing equipment | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-09-24 |
| 6398875 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, John P. Simons +1 more | 2002-06-04 |