Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6457480 | Process and apparatus for cleaning filters | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope, Charles J. Taft | 2002-10-01 |
| 6454869 | Process of cleaning semiconductor processing, handling and manufacturing equipment | John M. Cotte, Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope +1 more | 2002-09-24 |
| 6451375 | Process for depositing a film on a nanometer structure | John M. Cotte, Kenneth McCullough, Wayne M. Moreau, Charles J. Taft | 2002-09-17 |
| 6425956 | Process for removing chemical mechanical polishing residual slurry | John M. Cotte, Donald J. Delehanty, Kenneth McCullough, Wayne M. Moreau, Charles J. Taft +1 more | 2002-07-30 |
| 6398875 | Process of drying semiconductor wafers using liquid or supercritical carbon dioxide | John M. Cotte, Dario L. Goldfarb, Kenneth McCullough, Wayne M. Moreau, Keith R. Pope +1 more | 2002-06-04 |
| 6346484 | Method for selective extraction of sacrificial place-holding material used in fabrication of air gap-containing interconnect structures | John M. Cotte, Christopher V. Jahnes, Kenneth McCullough, Wayne M. Moreau, Satyanarayana V. Nitta +1 more | 2002-02-12 |