Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497963 | Hydrogenated oxidized silicon carbon material | Alfred Grill, Christopher V. Jahnes, Laurent Perraud | 2002-12-24 |
| 6479110 | Multiphase low dielectric constant material and method of deposition | Alfred Grill, Stephen M. Gates | 2002-11-12 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | Alfred Grill, John P. Hummel, Christopher V. Jahnes, Katherine L. Saenger | 2002-09-10 |
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes +2 more | 2002-09-10 |
| 6441491 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | Alfred Grill, David R. Medeiros | 2002-08-27 |
| 6437443 | Multiphase low dielectric constant material and method of deposition | Alfred Grill, Stephen M. Gates | 2002-08-20 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Katherina Babich, Alessandro C. Callegari, Julien Fontaine, Alfred Grill, Christopher V. Jahnes | 2002-08-06 |
| 6346747 | Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made | Alfred Grill, Christopher V. Jahnes | 2002-02-12 |
| 6337518 | Low dielectric constant amorphous fluorinated carbon and method of preparation | Alfred Grill | 2002-01-08 |