Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495825 | Apparatus for photo exposure of materials with subsequent capturing of volatiles for analysis | Mark S. Chace, John E. Darney, Wayne M. Moreau, Alfred Oscar Passano | 2002-12-17 |
| 6441491 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | Alfred Grill, Vishnubhai V. Patel | 2002-08-27 |
| 6420084 | Mask-making using resist having SIO bond-containing polymer | Marie Angelopoulos, Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, Ranee W. Kwong +3 more | 2002-07-16 |
| 6346362 | Polymers and use thereof | Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, Ranee W. Kwong | 2002-02-12 |