Issued Patents 2002
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497963 | Hydrogenated oxidized silicon carbon material | Christopher V. Jahnes, Vishnubhai V. Patel, Laurent Perraud | 2002-12-24 |
| 6479110 | Multiphase low dielectric constant material and method of deposition | Vishnubhai V. Patel, Stephen M. Gates | 2002-11-12 |
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Alessandro C. Callegari, Stephen A. Cohen, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2002-09-10 |
| 6448176 | Dual damascene processing for semiconductor chip interconnects | John P. Hummel, Christopher V. Jahnes, Vishnubhai V. Patel, Katherine L. Saenger | 2002-09-10 |
| 6441491 | Ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device containing the same | David R. Medeiros, Vishnubhai V. Patel | 2002-08-27 |
| 6437443 | Multiphase low dielectric constant material and method of deposition | Vishnubhai V. Patel, Stephen M. Gates | 2002-08-20 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Katherina Babich, Alessandro C. Callegari, Julien Fontaine, Christopher V. Jahnes, Vishnubhai V. Patel | 2002-08-06 |
| 6413852 | Method of forming multilevel interconnect structure containing air gaps including utilizing both sacrificial and placeholder material | Jeffrey Hedrick, Christopher V. Jahnes, Satyanarayana V. Nitta, Kevin S. Petrarca, Sampath Purushothaman +2 more | 2002-07-02 |
| 6391773 | Method and materials for through-mask electroplating and selective base removal | Panayotis Andricacos, Cyril Cabral, Jr., Roy A. Carruthers, Katherine L. Saenger | 2002-05-21 |
| 6388285 | Feram cell with internal oxygen source and method of oxygen release | Charles T. Black, Cyril Cabral, Jr., Deborah A. Neumayer, Wilbur D. Pricer, Katherine L. Saenger +1 more | 2002-05-14 |
| 6346747 | Method for fabricating a thermally stable diamond-like carbon film as an intralevel or interlevel dielectric in a semiconductor device and device made | Christopher V. Jahnes, Vishnubhai V. Patel | 2002-02-12 |
| 6337518 | Low dielectric constant amorphous fluorinated carbon and method of preparation | Vishnubhai V. Patel | 2002-01-08 |