Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Katherina Babich, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2002-09-10 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Katherina Babich, Julien Fontaine, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel | 2002-08-06 |
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Eduard A. Cartier, Michael A. Gribelyuk, Harald Okorn-Schmidt, Theodore H. Zabel | 2002-07-02 |
| 6395650 | Methods for forming metal oxide layers with enhanced purity | Fuad E. Doany, Evgeni Gousev, Theodore H. Zabel | 2002-05-28 |