Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Alessandro C. Callegari, Eduard A. Cartier, Harald Okorn-Schmidt, Theodore H. Zabel | 2002-07-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Alessandro C. Callegari, Eduard A. Cartier, Harald Okorn-Schmidt, Theodore H. Zabel | 2002-07-02 |