Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Alessandro C. Callegari, Eduard A. Cartier, Michael A. Gribelyuk, Theodore H. Zabel | 2002-07-02 |
| 6354309 | Process for treating a semiconductor substrate | Russell H. Arndt, Glenn W. Gale, Frederick William Kern, Jr., Karen P. Madden, George F. Ouimet +2 more | 2002-03-12 |
| 6355111 | Method for removing contaminants from a workpiece using a chemically reactive additive | Richard H. Gaylord, Frederick William Kern, Jr., Donald J. Martin, John Joseph Snyder, William A. Syverson | 2002-03-12 |