Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel, Christopher P. D'Emic +6 more | 2002-09-03 |
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-08-20 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-02-12 |