Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-08-20 |
| 6395650 | Methods for forming metal oxide layers with enhanced purity | Alessandro C. Callegari, Fuad E. Doany, Theodore H. Zabel | 2002-05-28 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Carol J. Heenan, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-02-12 |