Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-08-20 |
| 6358867 | Orientation independent oxidation of silicon | Helmut Tews, Jonathan E. Faltermeir, Rajeev Malik, Oleg Gluschenkov | 2002-03-19 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Wade J. Hodge, Steven M. Shank, Patrick R. Varekamp | 2002-02-12 |