Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Steven M. Shank, Patrick R. Varekamp | 2002-08-20 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Steven M. Shank, Patrick R. Varekamp | 2002-02-12 |