Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6498383 | Oxynitride shallow trench isolation and method of formation | Klaus D. Beyer, Fen F. Jamin | 2002-12-24 |
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6436196 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank | 2002-08-20 |
| 6346487 | Apparatus and method for forming an oxynitride insulating layer on a semiconductor wafer | Douglas A. Buchanan, Evgeni Gousev, Carol J. Heenan, Wade J. Hodge, Steven M. Shank | 2002-02-12 |