Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Kevin K. Chan, Matthew W. Copel, Christopher P. D'Emic +6 more | 2002-09-03 |
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Alessandro C. Callegari, Michael A. Gribelyuk, Harald Okorn-Schmidt, Theodore H. Zabel | 2002-07-02 |