Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6413386 | Reactive sputtering method for forming metal-silicon layer | Alessandro C. Callegari, Eduard A. Cartier, Michael A. Gribelyuk, Harald Okorn-Schmidt | 2002-07-02 |
| 6395650 | Methods for forming metal oxide layers with enhanced purity | Alessandro C. Callegari, Fuad E. Doany, Evgeni Gousev | 2002-05-28 |