Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444592 | Interfacial oxidation process for high-k gate dielectric process integration | Arne Ballantine, Douglas A. Buchanan, Eduard A. Cartier, Kevin K. Chan, Matthew W. Copel +6 more | 2002-09-03 |
| 6350321 | UHV horizontal hot wall cluster CVD/growth design | Kevin K. Chan, Raymond M. Sicina, Paul Kozlowski, Margaret Paggi Manny, Sandip Tiwari | 2002-02-26 |