Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6424388 | Reflective spatial light modulator array | Evan G. Colgan, James M. E. Harper, Frank B. Kaufman, Robert L. Melcher, James L. Speidell | 2002-07-23 |
| 6350321 | UHV horizontal hot wall cluster CVD/growth design | Kevin K. Chan, Christopher P. D'Emic, Raymond M. Sicina, Paul Kozlowski, Sandip Tiwari | 2002-02-26 |