Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6444578 | Self-aligned silicide process for reduction of Si consumption in shallow junction and thin SOI electronic devices | Cyril Cabral, Jr., Roy A. Carruthers, Kevin K. Chan, Guy M. Cohen, Kathryn Guarini +2 more | 2002-09-03 |
| 6440851 | Method and structure for controlling the interface roughness of cobalt disilicide | Paul D. Agnello, Cyril Cabral, Jr., Roy A. Carruthers, Christian Lavoie, Kirk D. Peterson +4 more | 2002-08-27 |
| 6424388 | Reflective spatial light modulator array | Evan G. Colgan, Frank B. Kaufman, Margaret Paggi Manny, Robert L. Melcher, James L. Speidell | 2002-07-23 |
| 6413859 | Method and structure for retarding high temperature agglomeration of silicides using alloys | Cyril Cabral, Jr., Roy A. Carruthers, Paul Kozlowski, Christian Lavoie, Joseph S. Newbury +1 more | 2002-07-02 |
| 6399496 | Copper interconnection structure incorporating a metal seed layer | Daniel C. Edelstein, Chao-Kun Hu, Andrew H. Simon, Cyprian Emeka Uzoh | 2002-06-04 |
| 6346175 | Modification of in-plate refractory metal texture by use of refractory metal/nitride layer | Evan G. Colgan, Kenneth P. Rodbell, Hiroshi Takatsuji | 2002-02-12 |