Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350321 | UHV horizontal hot wall cluster CVD/growth design | Kevin K. Chan, Christopher P. D'Emic, Paul Kozlowski, Margaret Paggi Manny, Sandip Tiwari | 2002-02-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6350321 | UHV horizontal hot wall cluster CVD/growth design | Kevin K. Chan, Christopher P. D'Emic, Paul Kozlowski, Margaret Paggi Manny, Sandip Tiwari | 2002-02-26 |