Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354309 | Process for treating a semiconductor substrate | Russell H. Arndt, Glenn W. Gale, Karen P. Madden, Harald Okorn-Schmidt, George F. Ouimet +2 more | 2002-03-12 |
| 6355111 | Method for removing contaminants from a workpiece using a chemically reactive additive | Richard H. Gaylord, Donald J. Martin, Harald Okorn-Schmidt, John Joseph Snyder, William A. Syverson | 2002-03-12 |
| 6356653 | Method and apparatus for combined particle location and removal | Jeffrey A. Brigante, Glenn W. Gale, Maurice R. Hevey, Ben Kim, Joel M. Sharrow +1 more | 2002-03-12 |