Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458020 | Slurry recirculation in chemical mechanical polishing | Thomas L. Conrad, David J. Fontaine, Rock Nadeau, Paul Smith, Theodore G. van Kessel | 2002-10-01 |
| 6356653 | Method and apparatus for combined particle location and removal | Glenn W. Gale, Maurice R. Hevey, Frederick William Kern, Jr., Ben Kim, Joel M. Sharrow +1 more | 2002-03-12 |