Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354309 | Process for treating a semiconductor substrate | Russell H. Arndt, Frederick William Kern, Jr., Karen P. Madden, Harald Okorn-Schmidt, George F. Ouimet +2 more | 2002-03-12 |
| 6356653 | Method and apparatus for combined particle location and removal | Jeffrey A. Brigante, Maurice R. Hevey, Frederick William Kern, Jr., Ben Kim, Joel M. Sharrow +1 more | 2002-03-12 |