Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448655 | Stabilization of fluorine-containing low-k dielectrics in a metal/insulator wiring structure by ultraviolet irradiation | Alessandro C. Callegari, Stephen A. Cohen, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel +2 more | 2002-09-10 |
| 6428894 | Tunable and removable plasma deposited antireflective coatings | Alessandro C. Callegari, Julien Fontaine, Alfred Grill, Christopher V. Jahnes, Vishnubhai V. Patel | 2002-08-06 |