Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458907 | Organometallic polymers and use thereof | Marie Angelopoulos, Ari Aviram, Ranee W. Kwong | 2002-10-01 |
| 6436605 | Plasma resistant composition and use thereof | Marie Angelopoulos, Ari Aviram, Edward D. Babich, Timothy A. Brunner, Thomas B. Faure +2 more | 2002-08-20 |
| 6420084 | Mask-making using resist having SIO bond-containing polymer | Marie Angelopoulos, Ari Aviram, Wu-Song Huang, Ranee W. Kwong, Robert N. Lang +3 more | 2002-07-16 |
| 6420088 | Antireflective silicon-containing compositions as hardmask layer | Marie Angelopoulos, Ari Aviram, Wu-Song Huang, Ranee W. Kwong, Wayne M. Moreau | 2002-07-16 |
| 6346362 | Polymers and use thereof | Ari Aviram, Wu-Song Huang, Ranee W. Kwong, David R. Medeiros | 2002-02-12 |