Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494966 | Method of minimizing contaminating deposits using dilute acid rinse | Virginia Chi-Chuen Chao, Scott A. Estes, Thomas M. Wagner | 2002-12-17 |
| 6436605 | Plasma resistant composition and use thereof | Marie Angelopoulos, Ari Aviram, Edward D. Babich, Timothy A. Brunner, C. Richard Guarnieri +2 more | 2002-08-20 |
| 6426177 | Single component developer for use with ghost exposure | Steven Flanders, Lyndon S. Gibbs, James P. Levin, Harold G. Linde, Joseph L. Malenfant, Jr. +1 more | 2002-07-30 |