Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6426177 | Single component developer for use with ghost exposure | Thomas B. Faure, Steven Flanders, Lyndon S. Gibbs, James P. Levin, Joseph L. Malenfant, Jr. +1 more | 2002-07-30 |
| 6368867 | Monitor for verification of ozone reaction | Margaret L. Gibson, John J. Lajza, Jr. | 2002-04-09 |
| 6368881 | Wafer thickness control during backside grind | Donald W. Brouillette, Thomas G. Ference, Michael S. Hibbs, Ronald L. Mendelson | 2002-04-09 |