Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479884 | Interim oxidation of silsesquioxane dielectric for dual damascene process | Stephen E. Greco, John P. Hummel, Joyce C. Liu, Vincent J. McGahay, Rebecca D. Mih +1 more | 2002-11-12 |
| 6348736 | In situ formation of protective layer on silsesquioxane dielectric for dual damascene process | Vincent J. McGahay, John P. Hummel, Joyce C. Liu, Rebecca D. Mih, Kamalesh K. Srivastava +1 more | 2002-02-19 |