Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495917 | Method and structure of column interconnect | John J. Ellis-Monaghan, Robert M. Geffken, Howard S. Landis, Rosemary A. Previti-Kelly, Bette L. Bergman Reuter +3 more | 2002-12-17 |
| 6426558 | Metallurgy for semiconductor devices | Jonathan D. Chapple-Sokol, Robert M. Geffken, David V. Horak, Mark P. Murray, Anthony K. Stamper | 2002-07-30 |
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Timothy C. Krywanczyk, Lawrence D. David, Matthew T. Tiersch, Eric J. White | 2002-03-12 |
| 6350393 | Use of CsOH in a dielectric CMP slurry | Alicia F. Francis, Brian L. Mueller, James A. Dirksen | 2002-02-26 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Mahadevaiyer Krishnan, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |