Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6394638 | Trench isolation for active areas and first level conductors | Edward W. Sengle, Mark D. Jaffe, Daniel N. Maynard, Mark A. Lavin, John A. Bracchitta | 2002-05-28 |
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Timothy C. Krywanczyk, Lawrence D. David, Matthew T. Tiersch | 2002-03-12 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Paul M. Feeney, Mahadevaiyer Krishnan, Joyce C. Liu +2 more | 2002-02-19 |
| 6340601 | Method for reworking copper metallurgy in semiconductor devices | Thomas F. Curran, Timothy C. Krywanczyk, Michael S. Lube, Matthew D. Moon, Rock Nadeau +6 more | 2002-01-22 |