Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455434 | Prevention of slurry build-up within wafer topography during polishing | Chad R. Binkerd, Jose Luis Cruz, Brian D. Pfeifer, Rosemary A. Previti-Kelly, Patricia Schink +1 more | 2002-09-24 |
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Lawrence D. David, Matthew T. Tiersch, Eric J. White | 2002-03-12 |
| 6340601 | Method for reworking copper metallurgy in semiconductor devices | Thomas F. Curran, Michael S. Lube, Matthew D. Moon, Rock Nadeau, Clark D. Reynolds +6 more | 2002-01-22 |