Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468135 | Method and apparatus for multiphase chemical mechanical polishing | Cuc K. Huynh, David Walker | 2002-10-22 |
| 6455434 | Prevention of slurry build-up within wafer topography during polishing | Chad R. Binkerd, Timothy C. Krywanczyk, Brian D. Pfeifer, Rosemary A. Previti-Kelly, Patricia Schink +1 more | 2002-09-24 |