Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468135 | Method and apparatus for multiphase chemical mechanical polishing | Jose Luis Cruz, David Walker | 2002-10-22 |
| 6432823 | Off-concentric polishing system design | Paul A. Manfredi, Thomas J. Martin, Douglas P. Nadeau, Yutong Wu | 2002-08-13 |
| 6387810 | Method for homogenizing device parameters through photoresist planarization | Gary J. Beardsley, Zhong-Xiang He, Michael P. McMahon | 2002-05-14 |
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Gary J. Beardsley, Timothy Scott Bullard, Theodore G. van Kessel, David Walker | 2002-03-05 |