Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Gary J. Beardsley, Cuc K. Huynh, Theodore G. van Kessel, David Walker | 2002-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Gary J. Beardsley, Cuc K. Huynh, Theodore G. van Kessel, David Walker | 2002-03-05 |