Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387810 | Method for homogenizing device parameters through photoresist planarization | Zhong-Xiang He, Cuc K. Huynh, Michael P. McMahon | 2002-05-14 |
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Timothy Scott Bullard, Cuc K. Huynh, Theodore G. van Kessel, David Walker | 2002-03-05 |