Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468135 | Method and apparatus for multiphase chemical mechanical polishing | Jose Luis Cruz, Cuc K. Huynh | 2002-10-22 |
| 6352596 | Post CMP cleaning method using a brush cleaner with torque monitor | Gary J. Beardsley, Timothy Scott Bullard, Cuc K. Huynh, Theodore G. van Kessel | 2002-03-05 |