Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Timothy C. Krywanczyk, Lawrence D. David, Eric J. White | 2002-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6355565 | Chemical-mechanical-polishing slurry and method for polishing metal/oxide layers | Paul M. Feeney, Timothy C. Krywanczyk, Lawrence D. David, Eric J. White | 2002-03-12 |