Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475072 | Method of wafer smoothing for bonding using chemo-mechanical polishing (CMP) | Jack O. Chu, Guy M. Cohen, Lijuan Huang, John A. Ott, Michael F. Lofaro | 2002-11-05 |
| 6368953 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Mahadevaiyer Krishnan, Kenneth J. Stein, Richard P. Volant | 2002-04-09 |
| 6361402 | Method for planarizing photoresist | Rangarajan Jagannathan, Mahadevaiyer Krishnan, Max G. Levy, Uma Satyendra, Matthew Sendelbach +2 more | 2002-03-26 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | William J. Cote, Paul M. Feeney, Mahadevaiyer Krishnan, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |