Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368953 | Encapsulated metal structures for semiconductor devices and MIM capacitors including the same | Kevin S. Petrarca, Donald F. Canaperi, Kenneth J. Stein, Richard P. Volant | 2002-04-09 |
| 6361402 | Method for planarizing photoresist | Donald F. Canaperi, Rangarajan Jagannathan, Max G. Levy, Uma Satyendra, Matthew Sendelbach +2 more | 2002-03-26 |
| 6358832 | Method of forming barrier layers for damascene interconnects | Daniel C. Edelstein, Timothy J. Dalton, John G. Gaudiello, Sandra G. Malhotra, Maurice McGlashan-Powell +2 more | 2002-03-19 |
| 6348076 | Slurry for mechanical polishing (CMP) of metals and use thereof | Donald F. Canaperi, William J. Cote, Paul M. Feeney, Joyce C. Liu, Michael F. Lofaro +2 more | 2002-02-19 |