Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472740 | Self-supporting air bridge interconnect structure for integrated circuits | Brett H. Engel | 2002-10-29 |
| 6451712 | Method for forming a porous dielectric material layer in a semiconductor device and device formed | Stephen E. Greco, Jeffrey Hedrick, Satyanarayana V. Nitta, Sampath Purushothaman, Kenneth P. Rodbell +1 more | 2002-09-17 |
| 6387754 | Method of forming an on-chip decoupling capacitor with bottom hardmask | Andrew P. Cowley, Peter A. Emmi, Erdem Kaltalioglu, Vincent J. McGahay | 2002-05-14 |
| 6358832 | Method of forming barrier layers for damascene interconnects | Daniel C. Edelstein, John G. Gaudiello, Mahadevaiyer Krishnan, Sandra G. Malhotra, Maurice McGlashan-Powell +2 more | 2002-03-19 |