Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Walter Frey, Michael J. Gambero, Neena Garg, Byeongju Park +1 more | 2002-12-03 |
| 6387754 | Method of forming an on-chip decoupling capacitor with bottom hardmask | Timothy J. Dalton, Andrew P. Cowley, Erdem Kaltalioglu, Vincent J. McGahay | 2002-05-14 |