Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495429 | Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealing | Michael E. Adamcek, Anthony G. Domenicucci, Stephen Fox, Kenneth J. Giewont, Thomas R. Kupiec +2 more | 2002-12-17 |
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Peter A. Emmi, Walter Frey, Michael J. Gambero, Byeongju Park +1 more | 2002-12-03 |