Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Peter A. Emmi, Walter Frey, Neena Garg, Byeongju Park +1 more | 2002-12-03 |