Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488778 | Apparatus and method for controlling wafer environment between thermal clean and thermal processing | Arne Ballantine, Peter A. Emmi, Walter Frey, Michael J. Gambero, Neena Garg +1 more | 2002-12-03 |
| 6429149 | Low temperature LPCVD PSG/BPSG process | Ashima B. Chakravarti, Richard A. Conti, Laertis Economikos | 2002-08-06 |
| 6403412 | Method for in-situ formation of bottle shaped trench by gas phase etching | Laertis Economikos | 2002-06-11 |
| 6359300 | High aspect ratio deep trench capacitor having void-free fill | Laertis Economikos | 2002-03-19 |