Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495429 | Controlling internal thermal oxidation and eliminating deep divots in SIMOX by chlorine-based annealing | Michael E. Adamcek, Anthony G. Domenicucci, Stephen Fox, Neena Garg, Kenneth J. Giewont +2 more | 2002-12-17 |