Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435947 | CMP polishing pad including a solid catalyst | Shumin Wang | 2002-08-20 |
| 6383065 | Catalytic reactive pad for metal CMP | Steven Grumbine, Christopher C. Streinz | 2002-05-07 |
| 6362104 | Method for polishing a substrate using a CMP slurry | Shumin Wang | 2002-03-26 |
| 6350393 | Use of CsOH in a dielectric CMP slurry | Alicia F. Francis, James A. Dirksen, Paul M. Feeney | 2002-02-26 |