Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6383065 | Catalytic reactive pad for metal CMP | Steven Grumbine, Brian L. Mueller | 2002-05-07 |
| 6347978 | Composition and method for polishing rigid disks | Mingming Fang, Shumin Wang | 2002-02-19 |