Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471884 | Method for polishing a memory or rigid disk with an amino acid-containing composition | Mingming Fang | 2002-10-29 |
| 6468137 | Method for polishing a memory or rigid disk with an oxidized halide-containing polishing system | Mingming Fang | 2002-10-22 |
| 6447371 | Chemical mechanical polishing slurry useful for copper/tantalum substrates | Vlasta Brusic Kaufman, Rodney Kistler | 2002-09-10 |
| 6435947 | CMP polishing pad including a solid catalyst | Brian L. Mueller | 2002-08-20 |
| 6432828 | Chemical mechanical polishing slurry useful for copper substrates | Vlasta Brusic Kaufman, Rodney Kistler | 2002-08-13 |
| 6395693 | Cleaning solution for semiconductor surfaces following chemical-mechanical polishing | — | 2002-05-28 |
| 6362106 | Chemical mechanical polishing method useful for copper substrates | Vlasta Brusic Kaufman, Rodney Kistler | 2002-03-26 |
| 6362104 | Method for polishing a substrate using a CMP slurry | Brian L. Mueller | 2002-03-26 |
| 6347978 | Composition and method for polishing rigid disks | Mingming Fang, Christopher C. Streinz | 2002-02-19 |