Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375693 | Chemical-mechanical planarization of barriers or liners for copper metallurgy | William J. Cote, Daniel C. Edelstein | 2002-04-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375693 | Chemical-mechanical planarization of barriers or liners for copper metallurgy | William J. Cote, Daniel C. Edelstein | 2002-04-23 |