Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497784 | Semiconductor wafer edge bead removal method and tool | Viraj Y. Sardesai | 2002-12-24 |
| 6344414 | Chemical-mechanical polishing system having a bi-material wafer backing film assembly | Kenneth M. Davis, Fen F. Jamin, Michael F. Lofaro | 2002-02-05 |