Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497784 | Semiconductor wafer edge bead removal method and tool | Bradley P. Jones | 2002-12-24 |
| 6342131 | Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field | Tomio Katata, Christopher Parks, John Benedict | 2002-01-29 |